Hydrofluoric Acid Vapor Etcher
COMMERCE, DEPARTMENT OF
About this opportunity
Notice ID Number: NIST-SS26-102 Title: Sources Sought Notice for Hydrofluoric Acid Vapor Etcher The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government�s anticipated needs. BACKGROUND The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro- and nano- fabricates devices to meet the NIST mission. Part of the required processing is using a Hydrofluoric Acid (HF) vapor etcher to etch films. The BMF currently has an HF vapor etcher that is used to process 100 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates. Specific requirements for the HF vapor etcher are: Must be made of materials compatible with HF Must meet all ind...