Rapid Thermal Annealing System
COMMERCE, DEPARTMENT OF
About this opportunity
Notice ID Number: NIST-SS26-105 Title: Sources Sought Notice for Rapid Thermal Annealing System The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government�s anticipated needs. BACKGROUND The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro- and nano- fabricates devices to meet the NIST mission. Part of the required processing includes rapidly annealing films. This is achieved though using a Rapid Thermal Annealing (RTA) system. The BMF currently has an RTA system used to process 76.2 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates. The minimum specifications for the RTA system are: Must be able to perform RTA acco...