Atomic Layer Deposition (ALD) Batch Reactor
COMMERCE, DEPARTMENT OF.NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY.DEPT OF COMMERCE NIST
Place of performance: Gaithersburg, MD
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- Posted
- Aug 26, 2026
- Closes
- Sep 1, 2026 (in 6 days)
At a glance
This is a government contract opportunity posted by COMMERCE, DEPARTMENT OF in the semiconductor machinery manufacturing category. The deadline is September 1, 2026, 7 days from now. Work is performed in Gaithersburg, MD.
Classification and identifiers
- Industry (NAICS)
- Semiconductor Machinery Manufacturing (333242)
- Product or service (PSC)
- Semiconductor Devices and Associated Hardware (5961)
- Solicitation number
- 1333ND26QNB030533
Who can apply
About this opportunity
AMENDMENT 1: The purpose of this amendment is to provide a list of timely submitted vendor questions along with the Government's responses. Please see below: 1. Question: Please identify the facility interfaces available for the existing dry vacuum pump, pump exhaust, ozone destruct system and vented precursor cabinet, including applicable connection types and their approximate distance from the intended tool location. Please also identify whether chilled water or any utility not listed in the Statement of Requirements will be available or required. Response: To clarify, as the requirements indicate, only a vacuum pump is provided by NIST. The inlet is NW40 and the pump outlet is either NW25 or NW40 depending upon the pump used. If the tool pump port is smaller than NW40, NIST can use a re...